A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature
A compact fiber optic Fabry-Perot (F-P) sensor for simultaneous acoustic and temperature measurement has been proposed in the research. The sensor consists of silicon-glass-silicon sandwich structure by anodic bonding. The air F-P cavity with a circular hole and slots utilizes the deformation of the...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8873583/ |