Devices based on series-connected Schottky junctions and β-Ga<sub>2</sub>O<sub>3</sub>/SiC heterojunctions characterized as hydrogen sensors
Field-effect hydrogen gas sensor devices were fabricated with the structure of a series connection between Schottky junctions and β-Ga<sub>2</sub>O<sub>3</sub>/6H-SiC heterojunctions. β-Ga<sub>2</sub>O<sub>3</sub> thin films were deposited on n-type an...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Copernicus Publications
2014-10-01
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Series: | Journal of Sensors and Sensor Systems |
Online Access: | http://www.j-sens-sens-syst.net/3/231/2014/jsss-3-231-2014.pdf |