Thin films of In2O3/SiO for Humidity Sensing Applications
This paper documents the manufacture and testing of a humidity sensor based on a combination of In2O3/SiO. A number of different sensor samples have been produced by thermal deposition and the effect of varying the vacuum pressure has also been investigated. The AC and DC conduction mechanisms have...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2002-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/2/6/205/ |