Broadband antireflection property of silicon nanocone arrays with porous sidewalls fabricated by Ag-catalyzed etching
Siliconnanocone (SiNC) arrays with porous sidewallswere successfully fabricated through a simple, low-cost Ag-catalyzed etching method. By electron spin resonance technique and TEM analysis, it has been verified that the formation of porous SiNC arrays is due to the gradual dissolution of the pristi...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4990456 |