Fabricating Femtosecond Laser-Induced Periodic Surface Structures with Electrophysical Anisotropy on Amorphous Silicon

One-dimensional periodic surface structures were formed by femtosecond laser irradiation of amorphous hydrogenated silicon (a-Si:H) films. The a-Si:H laser processing conditions influence on the periodic relief formation as well as correlation of irradiated surfaces structural properties with their...

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Bibliographic Details
Main Authors: Dmitrii Shuleiko, Mikhail Martyshov, Dmitrii Amasev, Denis Presnov, Stanislav Zabotnov, Leonid Golovan, Andrei Kazanskii, Pavel Kashkarov
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/1/42