Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes

Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes

Electrostatic driving and capacitive detection is widely used in micro hemispheric shell resonators (HSR). The capacitor gap distance is a dominant factor for the initial capacitance, and affects the driving voltage and sensitivity. In order to decrease the equivalent gap distance, a micro HSR with...

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Bibliographic Details
Main Authors: Renxin Wang, Bing Bai, Hengzhen Feng, Ziming Ren, Huiliang Cao, Chenyang Xue, Binzhen Zhang, Jun Liu
Format: Article
Language:English
Published: MDPI AG 2016-11-01
Series:Sensors
Subjects:
hemispheric shell resonator
annular electrodes
glassblowing
equivalent gap distance
Online Access:http://www.mdpi.com/1424-8220/16/12/1991

Internet

http://www.mdpi.com/1424-8220/16/12/1991

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