Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures

Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures

Monte Carlo analyses on statistical volume elements allow quantifying the effect of polycrystalline morphology, in terms of grain topology and orientation, on the scattering of the elastic properties of polysilicon springs. The results are synthesized through statistical (lognormal) distributions de...

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Bibliographic Details
Main Authors: Aldo Ghisi, Stefano Mariani
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Sensors
Subjects:
polysilicon MEMS
uncertainty estimation
statistical volume element
zero offset
Online Access:https://www.mdpi.com/1424-8220/19/15/3256

Internet

https://www.mdpi.com/1424-8220/19/15/3256

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