Polycrystalline-Silicon-MOSFET-Based Capacitorless DRAM With Grain Boundaries and Its Performances

In this work, a capacitorless one-transistor dynamic random access memory (1T-DRAM) based on a polycrystalline silicon (poly-Si) metal–oxide–semiconductor field-effect transistor was designed and analyzed through a technology computer-aided design (TCAD) simulation. A poly-Si t...

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Bibliographic Details
Main Authors: Sang Ho Lee, Won Douk Jang, Young Jun Yoon, Jae Hwa Seo, Hye Jin Mun, Min Su Cho, Jaewon Jang, Jin-Hyuk Bae, In Man Kang
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9387306/
Description
Summary:In this work, a capacitorless one-transistor dynamic random access memory (1T-DRAM) based on a polycrystalline silicon (poly-Si) metal&#x2013;oxide&#x2013;semiconductor field-effect transistor was designed and analyzed through a technology computer-aided design (TCAD) simulation. A poly-Si thin film was utilized within the device because of several advantages, including its low fabrication cost and the feasibility of its use in high-density three-dimensional (3D) memory arrays. An asymmetric dual-gate structure is proposed to perform the write &#x201C;1&#x201D; operation and achieve high retention characteristics. The proposed 1T-DRAM cell demonstrates a high sensing margin of <inline-formula> <tex-math notation="LaTeX">$8.73~\mu \text{A} / \mu \text{m}$ </tex-math></inline-formula> and a high retention time of 704.4 ms compared to previously reported 1T-DRAMs, even at a high temperature. In addition, the effect of grain boundaries on the memory performance of the proposed device was investigated, and the results validated the excellent reliability of its retention characteristics even in the presence of grain boundaries (&#x003E;64 ms at <inline-formula> <tex-math notation="LaTeX">$T =358$ </tex-math></inline-formula> K).
ISSN:2169-3536