Effect of substrate on phase-change characteristics of GeSb thin films and its potential application in three-level electrical storage
Phase-change Ge8Sb92 films were deposited on the varied thermal-conductivity substrates by radio frequency sputtering and their crystallization behavior was investigated. Situ sheet resistance measurement and the X-ray diffraction spectra show a double stage phase transitions of Ge8Sb92 films on the...
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-01-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5052314 |