A Gaussian Mixture Model Clustering Ensemble Regressor for Semiconductor Manufacturing Final Test Yield Prediction

In the semiconductor industry, many studies have been carried out for front-end related process improvement and yield prediction using machine learning techniques. However, very few research investigations have dealt with the backend Final Test (FT) yield prediction using the front-end wafer accepta...

Full description

Bibliographic Details
Main Authors: Dan Jiang, Weihua Lin, Nagarajan Raghavan
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9337923/