Design, Fabrication and Optimization of a Silicon MEMS Natural Gas Sensor
This study reports on the integration of a Silicon MEMS hotplate into a natural gas quality analyzer, i.e., a miniaturized gas viscometer used to measure the Wobbe Index (WI). COMSOL Multiphysics simulation was used for selection of the optimum geometry of the hotplate and gas sensing cell. Experime...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-08-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/1/4/470 |