Electron-beam induced deposition and autocatalytic decomposition of Co(CO)3NO

The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)5, and cobalt tricarbonyl nitrosyl, Co(CO)3NO. Different deposits are prep...

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Bibliographic Details
Main Authors: Florian Vollnhals, Martin Drost, Fan Tu, Esther Carrasco, Andreas Späth, Rainer H. Fink, Hans-Peter Steinrück, Hubertus Marbach
Format: Article
Language:English
Published: Beilstein-Institut 2014-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.5.129