Electron-beam induced deposition and autocatalytic decomposition of Co(CO)3NO
The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)5, and cobalt tricarbonyl nitrosyl, Co(CO)3NO. Different deposits are prep...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2014-07-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.5.129 |