Design Optimization of Cantilever Based MEMS Micro-accelerometer for High-g Applications
Design optimization study of micro-cantilever based MEMS accelerometer is presented in this paper. The cantilever structure is dc biased with an ac signal to extract output voltage generated due to the change in capacitance. This signal modifies the behavior of the sensing element. The cantilever pe...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_09/P_533.pdf |