Optical Fiber-Tip Sensors Based on In-Situ µ-Printed Polymer Suspended-Microbeams
Miniature optical fiber-tip sensors based on directly µ-printed polymer suspended-microbeams are presented. With an in-house optical 3D μ-printing technology, SU-8 suspended-microbeams are fabricated in situ to form Fabry–Pérot (FP) micro-interferometers on the...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/18/6/1825 |