Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection
Abstract Acoustic wave resonators are promising candidates for gravimetric biosensing. However, they generally suffer from strong acoustic radiation in liquid, which limits their quality factor and increases their frequency noise. This article presents an acoustic radiation-free gravimetric biosenso...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-01-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-020-00236-9 |