An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions
In this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experim...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2020/23/matecconf_icmie2020_01004.pdf |