Design of a Low Voltage 0.18 mm CMOS Surface Acoustic Wave Gas Sensor
a Surface Acoustic Wave (SAW) gas sensor is designed and tested in this paper. The objective of the designed SAW Gas sensor is to detect H2S and NOX gases. The inter-digital transducers (IDT) antennas in the proposed sensor are coated with thin film WO3, which mass is sensitive to mentioned gas conc...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-02-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/february_2011/P_747.pdf |