Synthesis of boride-titanium coatings by magnetron sputtering of composite targetss

The paper presents the results of investigations of the structure and phase composition of titanium boride coatings deposited by magnetron sputtering from a target of a complex composition onto a steel substrate. The target for magnetron sputtering was obtained by sintering boron carbide and titaniu...

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Bibliographic Details
Main Authors: A.S. Larionov, E.A. Zhakanbaeyev, A.L. Kozlovski, A.S. Dikov, S.B. Kislitsin, L.V. Chekushina
Format: Article
Language:English
Published: L.N. Gumilyov Eurasian National University 2018-09-01
Series:Eurasian Journal of Physics and Functional Materials
Subjects:
Online Access:http://ephys.kz/files/2018-09-26_2018020306.pdf