Synthesis of boride-titanium coatings by magnetron sputtering of composite targetss
The paper presents the results of investigations of the structure and phase composition of titanium boride coatings deposited by magnetron sputtering from a target of a complex composition onto a steel substrate. The target for magnetron sputtering was obtained by sintering boron carbide and titaniu...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
L.N. Gumilyov Eurasian National University
2018-09-01
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Series: | Eurasian Journal of Physics and Functional Materials |
Subjects: | |
Online Access: | http://ephys.kz/files/2018-09-26_2018020306.pdf |