Investigation Effect of Residual Stress On Pull-In Voltage of Circular Micro Plate Subjected to Nonlinear Electrostatic Force
Electrostaticaly actuated circular micro plates are used in the many MEMS devices such as micropumps and optical switches. All such systems exhibit an instability phenomenon, which it is known as the “pull-in” instability. In this paper a distributed model has been used to investigate efficacy of re...
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2010-12-01
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| Series: | Sensors & Transducers |
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| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_2010/P_721.pdf |