Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibili...

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Bibliographic Details
Main Authors: Masaaki Hashimoto, Yoshihiro Taguchi
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/4/362