The Investigation of E-beam Deposited Titanium Dioxide and Calcium Titanate Thin Films
Thin titanium dioxide and calcium titanate films were deposited using electron beam evaporation technique. The substrate temperature during the deposition was changed from room temperature to 600 °C to test its influence on TiO2 film formation and optical properties. The properties of CaTiO3 were in...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Kaunas University of Technology
2013-09-01
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| Series: | Medžiagotyra |
| Subjects: | |
| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/1805 |