Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

In this work, three-dimensional finite element analysis (3D FEA) of quasi-surface acoustic wave (QSAW) resonators with high accuracy is reported. The QSAW resonators consist of simple molybdenum (Mo) interdigitated transducers (IDT) on solidly mounted stacked layers of AlN/Mo/Si. Different to the SA...

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Bibliographic Details
Main Authors: Wen Chen, Linwei Zhang, Shangshu Yang, Wenhan Jia, Songsong Zhang, Yuandong Gu, Liang Lou, Guoqiang Wu
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Micromachines
Subjects:
quasi-surface acoustic wave (QSAW) resonator
microelectromechnical systems (MEMS)
finite element analysis
aluminum nitride
Online Access:https://www.mdpi.com/2072-666X/12/9/1118

Internet

https://www.mdpi.com/2072-666X/12/9/1118

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