Capacitance Properties in Ba<sub>0.3</sub>Sr<sub>0.7</sub>Zr<sub>0.18</sub>Ti<sub>0.82</sub>O<sub>3</sub> Thin Films on Silicon Substrate for Thin Film Capacitor Applications
Crystalline Ba<sub>0.3</sub>Sr<sub>0.7</sub>Zr<sub>0.18</sub>Ti<sub>0.82</sub>O<sub>3</sub> (BSZT) thin film was grown on Pt(111)/Ti/SiO<sub>2</sub>/Si substrate using radio frequency (RF) magnetron sputtering. Based on our best...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/10/4/318 |