Phase Formation and Thermal Stability of Reactively Sputtered YTaO<sub>4</sub>–ZrO<sub>2</sub> Coatings

Y<sub>(1−x)/2</sub>Ta<sub>(1−x)/2</sub>Zr<sub>x</sub>O<sub>2</sub> coatings with 0 to 44 mol% ZrO<sub>2</sub> were synthesized by sputtering. Phase-pure <i>M’</i>-YTaO<sub>4</sub> coatings were obtained at a substrat...

Full description

Bibliographic Details
Main Authors: Bastian Stelzer, Katrin Pingen, Marcus Hans, Damian M. Holzapfel, Silvia Richter, Joachim Mayer, Konda Gokuldoss Pradeep, Jochen M. Schneider
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Materials
Subjects:
PVD
Online Access:https://www.mdpi.com/1996-1944/14/3/692