Phase Formation and Thermal Stability of Reactively Sputtered YTaO<sub>4</sub>–ZrO<sub>2</sub> Coatings
Y<sub>(1−x)/2</sub>Ta<sub>(1−x)/2</sub>Zr<sub>x</sub>O<sub>2</sub> coatings with 0 to 44 mol% ZrO<sub>2</sub> were synthesized by sputtering. Phase-pure <i>M’</i>-YTaO<sub>4</sub> coatings were obtained at a substrat...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-02-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/14/3/692 |