State-of-the-art and recent developments in micro/nanoscale pressure sensors for smart wearable devices and health monitoring systems
Small-sized, low-cost, and high-sensitivity sensors are required for pressure-sensing applications because of their critical role in consumer electronics, automotive applications, and industrial environments. Thus, micro/nanoscale pressure sensors based on micro/nanofabrication and micro/nanoelectro...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-03-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2589554019300522 |