A Novel Monitoring Strategy Combining the Advantages of NPE and GMM

A Novel Monitoring Strategy Combining the Advantages of NPE and GMM

Semiconductor manufacturing process data usually have multimodel and multiphase characteristics which do not meet the application assumptions in neighborhood preserving embedding (NPE). Aiming at the above limitations of NPE, a novel monitoring strategy combining the advantages of the neighborhood p...

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Bibliographic Details
Main Authors: Cheng Zhang, Xunian Dai, Xiaofang Zheng, Yuan Li
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Batch production systems
fault detection
Gaussian mixture model
multimodel
moving window
neighborhood preserving embedding
Online Access:https://ieeexplore.ieee.org/document/9078081/

Internet

https://ieeexplore.ieee.org/document/9078081/

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