CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

An integrated humidity sensor system with nano-structured carbon nitride film as humidity sensing material is fabricated by a 0.8 μm analog mixed CMOS process. The integrated sensor system consists of differential humidity sensitive field effect transistors (HUSFET), temperature sensor, and opera...

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Bibliographic Details
Main Authors: Shaestagir Chowdhury, Ji Gong Lee, Sung Pil Lee
Format: Article
Language:English
Published: MDPI AG 2008-04-01
Series:Sensors
Subjects:
Integrated sensors
Humidity
CMOS
Carbon nitride film
Online Access:http://www.mdpi.com/1424-8220/8/4/2662/

Internet

http://www.mdpi.com/1424-8220/8/4/2662/

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