Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film

Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film

A novel relative humidity sensor that is based on a linear piezoelectric micromachined ultrasonic transducer (pMUT) array was proposed and microfabricated for high sensitivity, fast response, and good stability. The humidity-sensitive graphene oxide (GO) film was deposited on the pMUT array with a f...

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Bibliographic Details
Main Authors: Changhe Sun, Qiongfeng Shi, Mahmut Sami Yazici, Chengkuo Lee, Yufei Liu
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Sensors
Subjects:
piezoelectric micromachined ultrasonic transducer
humidity sensor
graphene oxide
array structure
high sensitivity
Online Access:https://www.mdpi.com/1424-8220/18/12/4352

Internet

https://www.mdpi.com/1424-8220/18/12/4352

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