Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control
This paper reports piezoelectrically driven and sensed micromirrors achieving extremely large total optical scan angle of 106° and high frequency of 45 kHz at 22 V. To reach such large angles, extensive FEM-simulations relating to fracture strength of poly-Si, of which these micromirrors primarily c...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/561 |