Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer
Resonance features of slender mechanical parts of Lorentz force MEMS magnetometers are affected by the (weakly) coupled thermo-electro-magneto-mechanical multi-physics governing their dynamics. We recently showed that reduced-order models for such parts can be written in the form of the Duffing equa...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-04-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/8/2/36 |