Porous Dielectrics in Microelectronic Wiring Applications
Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in integrated circuits. They are typically based on low density modifications of amorphous SiO2 known as SiCOH or carbon-d...
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| Format: | Article |
| Language: | English |
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MDPI AG
2010-01-01
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| Series: | Materials |
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| Online Access: | http://www.mdpi.com/1996-1944/3/1/536/ |