Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suite...

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Bibliographic Details
Main Authors: Yonggang Yin, Boqian Sun, Fengtian Han
Format: Article
Language:English
Published: MDPI AG 2016-05-01
Series:Sensors
Subjects:
MEMS accelerometer
three-component geophone
electrostatic suspension
cross-axis coupling
self-locking
nonlinear compensation
dynamic stiffness
seismic sensing
Online Access:http://www.mdpi.com/1424-8220/16/5/711

Internet

http://www.mdpi.com/1424-8220/16/5/711

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