Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suite...

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Bibliographic Details
Main Authors:	Yonggang Yin, Boqian Sun, Fengtian Han
Format:	Article
Language:	English
Published:	MDPI AG 2016-05-01
Series:	Sensors
Subjects:	MEMS accelerometer three-component geophone electrostatic suspension cross-axis coupling self-locking nonlinear compensation dynamic stiffness seismic sensing
Online Access:	http://www.mdpi.com/1424-8220/16/5/711

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