Nanoscale patterning of CrPt3 magnetic thin films by using ion beam irradiation
We have successfully fabricated planar patterned CrPt3 ordered L12 alloy films by Kr+ ion irradiation. Planar-patterned CrPt3 nanodots with various bit sizes from 200 nm to 50 nm were successfully fabricated by 30 keV Kr+ ion irradiation at a dose of 2 × 1014 ions/cm2, where e-beam lithography was u...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2016-01-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S221137971630002X |