Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates

Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates

We study the influence of von Karman nonlinearity, van der Waals force, and a athermal stresses on pull-in instability and small vibrations of electrostatically actuated mi-croplates. We use the Galerkin method to develop a tractable reduced-order model for elec-trostatically actuated clamped rectan...

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Bibliographic Details
Main Authors: Davide Spinello, Maurizio Porfiri, Romesh C. Batra
Format: Article
Language:English
Published: MDPI AG 2008-02-01
Series:Sensors
Subjects:
Microelectromechanical systems
microplate
van der Waals force
pull-in insta- bility
microsensor
Online Access:http://www.mdpi.com/1424-8220/8/2/1048/

Internet

http://www.mdpi.com/1424-8220/8/2/1048/

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