NUMERICAL SIMULATION OF PH EFFECT ON COPPER ELECTRODEPOSITION INSIDE INSULATED TRENCH - PART I
Current distribution of copper electrodeposition in a trench (at different flow conditions) was studied taking into consideration the effect of hydrogen evolution. Due to pH effect on solubility of Cu+2 ions and the feasibility to precipitate as hydroxides at high pH, thus the importance of such stu...
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| Format: | Article |
| Language: | English |
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Taylor's University
2017-04-01
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| Series: | Journal of Engineering Science and Technology |
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| Online Access: | http://jestec.taylors.edu.my/Vol%2012%20issue%204%20April%202017/12_4_12.pdf |