Optimized amorphous silicon nitride layers for the front side passivation of c-Si PERC solar cells

Plasma-enhanced chemical vapour deposition (PECVD) SiNx is the typical choice as anti-reflection coating (ARC) for Silicon based solar cells. However, there still exists a room for improvement in passivation quality of SiNx while maintaining good optics for the front side of a solar cell. In this pa...

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Bibliographic Details
Main Authors: Mohamed Okasha Mohamed Okasha Asmaa, Kafle Bishal, Torda Benjamin, Teßmann Christopher, Hofmann Marc
Format: Article
Language:English
Published: EDP Sciences 2020-01-01
Series:EPJ Photovoltaics
Subjects:
Online Access:https://www.epj-pv.org/articles/epjpv/full_html/2020/01/pv190016/pv190016.html