Optimized amorphous silicon nitride layers for the front side passivation of c-Si PERC solar cells
Plasma-enhanced chemical vapour deposition (PECVD) SiNx is the typical choice as anti-reflection coating (ARC) for Silicon based solar cells. However, there still exists a room for improvement in passivation quality of SiNx while maintaining good optics for the front side of a solar cell. In this pa...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2020-01-01
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Series: | EPJ Photovoltaics |
Subjects: | |
Online Access: | https://www.epj-pv.org/articles/epjpv/full_html/2020/01/pv190016/pv190016.html |