FRACTAL GEOMETRIES IN LATERAL FLUX CAPACITOR DESIGN – EXPERIMENTAL RESULTS
Capacitance density is increased when lateral flux structures are used in CMOS technologies compared to classic parallel-palate capacitors. Lateral-flux capacitors where designed based on three different fractal geometries. Capacitors are designed with and without special MMC metal layer available...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Lublin University of Technology
2015-06-01
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| Series: | Informatyka, Automatyka, Pomiary w Gospodarce i Ochronie Środowiska |
| Subjects: | |
| Online Access: | https://ph.pollub.pl/index.php/iapgos/article/view/982 |