Optimized Batch Process for Organic MEMS Devices

Optimized Batch Process for Organic MEMS Devices

Recently, organic electromechanical transducers have attracted intense scientific and technological interest due to their unique mechanical flexibility and their piezoelectric properties. However, the fabrication of organic MEMS devices is challenging. For example, a lift-off process cannot be used...

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Bibliographic Details
Main Authors: Jonas Hafner, Marco Teuschel, Jürgen Schrattenholzer, Michael Schneider, Ulrich Schmid
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
flexible and soft electronics
micro- and nanofabrication
ferro- and piezoelectricity
organic materials
polymers
CMOS-process
Online Access:https://www.mdpi.com/2504-3900/2/13/904

Internet

https://www.mdpi.com/2504-3900/2/13/904

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