Silicon-on-insulator with hybrid orientations for heterogeneous integration of GaN on Si (100) substrate

Silicon-on-insulator with hybrid orientations for heterogeneous integration of GaN on Si (100) substrate

Heterogeneous integration of materials pave a new way for the development of the microsystem with miniaturization and complex functionalities. Two types of hybrid silicon on insulator (SOI) structures, i.e., Si (100)-on-Si (111) and Si (111)-on-Si (100), were prepared by the smart-cut technique, whi...

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Bibliographic Details
Main Authors: Runchun Zhang, Beiji Zhao, Kai Huang, Tiangui You, Qi Jia, Jiajie Lin, Shibin Zhang, Youquan Yan, Ailun Yi, Min Zhou, Xin Ou
Format: Article
Language:English
Published: AIP Publishing LLC 2018-05-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5030776

Internet

http://dx.doi.org/10.1063/1.5030776

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