Modeling of an Aged Porous Silicon Humidity Sensor Using ANN Technique
Porous silicon (PS) sensor based on capacitive technique used for measuring relative humidity has the advantages of low cost, ease of fabrication with controlled structure and CMOS compatibility. But the response of the sensor is nonlinear function of humidity and suffers from errors due to aging an...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2006-10-01
|
| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_06/P_89.PDF |