Evaluation of micro structure by fusion of three dimensional shape measurement and ultimate analysis using SEM
The 3-D measurement method by SEM has already been proposed by using the principle of projection moiré. In this method, by the mechanism of producing some shadows of grid on the surface of the object by back scattering electron beam, a micro-size object can be measured in high resolution. However, i...
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| Format: | Article |
| Language: | English |
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EDP Sciences
2015-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20153205002 |