Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation

In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the e...

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Bibliographic Details
Main Authors: Kyungjin Park, Kanghyun Kim, Seung Chul Lee, Geunbae Lim, Jong Hyun Kim
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Materials
Subjects:
Online Access:http://www.mdpi.com/1996-1944/11/8/1460