Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation
In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the e...
Main Authors: | Kyungjin Park, Kanghyun Kim, Seung Chul Lee, Geunbae Lim, Jong Hyun Kim |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-08-01
|
Series: | Materials |
Subjects: | |
Online Access: | http://www.mdpi.com/1996-1944/11/8/1460 |
Similar Items
-
Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography
by: Kanghyun Kim, et al.
Published: (2021-03-01) -
Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
by: Tianxu Jia, et al.
Published: (2021-01-01) -
Microstructural Characterization and Corrosion Behavior of Al 7075 Alloys Using X-ray Synchrotron Tomography
Published: (2015) -
Substrate Effect in Electron Beam Lithography
by: Kornelia Indykiewicz, et al.
Published: (2018-01-01) -
Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography
by: Harutaka Mekaru
Published: (2015-02-01)