Optimization of Pt-C Deposits by Cryo-FIBID: Substantial Growth Rate Increase and Quasi-Metallic Behaviour

Optimization of Pt-C Deposits by Cryo-FIBID: Substantial Growth Rate Increase and Quasi-Metallic Behaviour

The Focused Ion Beam Induced Deposition (FIBID) under cryogenic conditions (Cryo-FIBID) technique is based on obtaining a condensed layer of precursor molecules by cooling the substrate below the condensation temperature of the gaseous precursor material. This condensed layer is irradiated with ions...

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Bibliographic Details
Main Authors: Alba Salvador-Porroche, Soraya Sangiao, Patrick Philipp, Pilar Cea, José María De Teresa
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Nanomaterials
Subjects:
nanolithography
focused ion beam induced deposition
cryogenic conditions
Pt-based deposits
metal layers
semiconductor industry
Online Access:https://www.mdpi.com/2079-4991/10/10/1906

Internet

https://www.mdpi.com/2079-4991/10/10/1906

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