A Novel Sensor for VOCs Using Nanostructured ZnO and MEMS Technologies
A sensor for detection of vapors of volatile organic compounds (VOCs) incorporating nanostructured zinc oxide film and silicon micromachining is reported. One of the key features of the sensor is the use of nanostructured ZnO material which has been synthesized using a novel low cost process. Consid...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2012-03-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/march_2012/SENSORDEVICES/P_SI_195.pdf |