Wavelength Dependence of Photoinduced Microcantilever Bending in the UV-VIS Range

Micromechanical devices such as microcantilevers (MC) respond to irradiationwith light by at least two different, photon-mediated processes, which induce MC bendingas a consequence of differential surface stress. The first and slow bending is due to theabsorption of photons, whose energy is transfor...

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Bibliographic Details
Main Authors: Mark Helm, Lorenz J. Steinbock
Format: Article
Language:English
Published: MDPI AG 2008-01-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/8/1/23/