Solubility limit and material properties of a κ-(AlxGa1−x)2O3 thin film with a lateral cation gradient on (00.1)Al2O3 by tin-assisted PLD
A ternary, orthorhombic κ-(AlxGa1−x)2O3 thin film was synthesized by combinatorial pulsed laser deposition on a 2 in. in diameter c-sapphire substrate with a composition gradient. Structural, morphological, and optical properties were studied as a function of the alloy composition. The thin film cry...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-02-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.5141041 |