Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal–Organic Chemical Vapor Deposition

<p>Abstract</p> <p>ZnO was grown on sapphire substrate by metal&#8211;organic chemical vapor deposition using the diethylzinc (DEZn) and oxygen (O<sub>2</sub>) as source chemicals at 500 &#176;C. Influences of the chamber pressure and O<sub>2</sub>/D...

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Bibliographic Details
Main Authors: Horng RH, Wu CC, Wuu DS, Lin PR, Chen TN
Format: Article
Published: SpringerOpen 2009-01-01
Series:Nanoscale Research Letters
Online Access:http://dx.doi.org/10.1007/s11671-009-9257-2